High Purity Acid Bulk Storage & Distribution System
SRI designed, fabricated, permitted and installed this high purity acid bulk storage system to provide acid at demand to number of tools at this Semiconductor manufacturing facility in Milpitas California. This project included 4,400 gallon bulk storage, double contained pump station, double contained distribution system, two 4-Valve Manifold Box (VMB) and five single VMBs. Each station was equipped with dead-man switch for the operator to fill a tool. All systems were equipped with leak detection systems.
The ROI for this project was 1.3 and was installed within budget and schedule in record time.
See Recommendation letter under Testimonial heading.