BiCMos Foundry
BiCMos Foundry
Multiple projects with this satisfied client!
BiCMOS Foundry is a chip manufacturing facility. In 2006 SRI was hired to perform tool design installation for Novellus and MRC tools. Some of the gases used in this projects were Phosphine (PH3), Silane (SiH4) and Nitrogen.
The Wright-Polanco-Lempert Hazardous Waste Treatment Permit Reform Act of 1992 (Assembly Bill 1772), which went into effect on January 1, 1993, made important changes to State law governing the treatment and storage of hazardous wastes. Assembly Bill 1772 (AB1722) established a five-tiered program for authorizing treatment and/or storage at many businesses that require State authorization to treat or store hazardous waste, but do not require a hazardous waste facility permit under the Resource Conservation and Recovery Act (RCRA). The “Permit by Rule” (PBR) tier for non-RCRA regulated, on site treatment facilities subject to the requirements set forth in Title 22 of the California Code of Regulations CCR), Division 4.5, Chapter 45 (22 CCR §67450), which requires a Registered Professional Engineer to certify all treatment tanks in a Fixed Treatment Unit.
