Analog Devices
Analog Devices
SRI designed, fabricated, permitted, and installed a bulk-high-purity-acid delivery system to provide acid at demand to several tools at this Semiconductor manufacturing facility in Milpitas, California. This project included 4,400-gallon bulk storage, a double-contained pump station, a double-contained distribution system, two 4-Valve Manifold Box (VMB), and five single VMBs. Each station was equipped with a dead-man switch for the operator to fill a tool or sink. All systems were equipped with leak detection systems.
The ROI for this project was 1.3 and was installed within budget and schedule in record time.